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Photolithography for Microfluidics

Photolithography is the cleanroom process that prints micro-patterns using light — and it makes the masters and features behind most research microfluidic chips. Here is how it works and where it fits.

What is photolithography?

Photolithography transfers a pattern from a mask onto a light-sensitive photoresist on a wafer. UV light shines through the mask, and developing the resist leaves a precise micro-pattern. It is the workhorse of microfabrication and the microelectronics industry.

Its role in microfluidics

For microfluidics, photolithography most often makes the master mould: a patterned layer of SU-8 photoresist on silicon that defines the channel network. Soft lithography then casts PDMS against that master. It is also a step in making glass chips (patterning before etching).

Strengths

  • Very high resolution — down to micron and sub-micron features.
  • High-fidelity, reusable masters — one master makes many chips.

Limits and the production link

Photolithography needs cleanroom facilities, is largely 2.5D (extruded shapes), and suits prototyping rather than volume parts. For production, the validated design moves to injection moulding; a more accessible alternative for masters and tooling is CNC micromachining. See prototype to scale.

Frequently asked questions

What is photolithography in microfluidics?

A cleanroom process that uses UV light and photoresist to pattern micro-features — most often the SU-8 master mould used to cast PDMS chips, and a step in making glass chips.

What is SU-8?

A thick negative photoresist widely used to make high-aspect-ratio master moulds for soft lithography in microfluidics.

Is photolithography used for mass production of microfluidics?

Not directly — it is a prototyping and master-making process. Volume production uses injection moulding, with masters/tools often made by photolithography or CNC machining.

From master to part

Past the cleanroom prototype?

We take photolithography-defined designs to durable tooling and moulded production. Upload a design for a quote, or book a call.

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